Large-stroke tabletop microscope, fully electric lens switching, electric aperture
Illumination observation has penetrating light and reflected light options
The industry’s only ultra-wide-angle 26.5mm field of view eyepiece
XY stage with quick movement clutch
Industrial application
Suitable for semiconductor wafer inspection, glass panel defect inspection, probe card or IC carrier board observation
Observation method matching
Various observation methods can be applied to the analysis of different material structures
Dark field differential interference polarized light
Fluorescent IR through light/backlight
Expanded collocation
You can also choose to use a wafer conveyor for wafer inspection.
MARCO, BACK-SIDE, MICRO observation
Fully automatic inspection of 8/6-inch wafers, fully automatic inspection of 8/12-inch wafers
