WLI white light interferometer

High quality white light interferometer made in Germany

Features:

1. 3D surface observation of microstructures for various material products

2. Z-axis 3D PROFILE measurement of small structures

3. Non-contact roughness measurement

4. Can measure the surface structure of different reflectivity and transparent materials

5. Z-axis analysis accuracy 1nm – 0.1nm

6. It can be installed in specialized equipment institutions according to the size of the product.

3D scanning principle

white light interferenceWhite Light Interferometry:

Pass a light source of a specific wavelength through a flat or convex mirror (DI objective lens)

Two reflections through the object produce "Newton rings" (also called interference fringes).

Its Z-axis upper and lower limit range scanning definition principle

Use the generation of interference fringes as the focal length judgment value

Can be equipped with interference objectives with different magnifications

The white light interference head can be mounted on different mechanisms

Connect with the machine to perform various analyzes and measurements

Can be used with the original electric stage (optional)

Optional active anti-vibration table,

Air-floating anti-vibration platform, anti-vibration damping platform

Topography 3D measurement function:

Ability to analyze and measure roughness and flatness

Roughness parameter Rz

International specifications for roughness: DIN 4762/1E, ISO/DIS 4287/1

Waveness parameter Wt

International standard for flatness: Standard: DIN 4774 

Roughness report format can be output and set according to needs

3D graphics, 2D planes, thickness graphics