Fully automatic white light interferometry system
Can measure 8-inch and 12-inch wafers
LOADER can also be planned
Both FOSB and FOUP can be applied
product description
Features
product specification
video introduction
Fully automatic wafer white light interference measurement
Measurement points can be set for fully automatic measurement
Micro structure height measurement, plane measurement, roughness measurement, film thickness measurement
Export report and upload after measurement
LOADER can be planned according to the type of wafer box
Both front and back examination and microscopic examination are available
Welcome to call us for planning
